Particle Sensor KS-16F

0.1µm, 10 mL/min



Measuring Instruments > Particle Counting Systems > Liquid Particle Counter
Semiconductor > Particle Counter Semiconductor > Liquid Particle Counter Semiconductor


Process monitoring at critical system points
Integrated use in central chemical supply systems and wet benches
Counting efficiency is 65% and higher
Deionized water, chemical solution, hydrofluoric (KS-16F) measurements
Display, control and printout are possible with KZ-70
Direct control by computer (using KZ-70 together is possible)
Build up real time monitoring system with the software of RP-monitor or KF-02A

< Specification >

Optical system: 90° light-scattering
Light source: Laser diode (wave length: 830nm)
Light detector: PIN Photo diode
Sample object: including hydrofluoric acid
Materials of parts exposed to sample fluid: Sapphire, PFA
Measurement size range: 0.1, 0.15, 0.2, 0.3, 0.5µm and over (5 channels)
Flow rate: 10 mL/min
Max. particle concentration: 1200particles/mL (coincidence loss 5%)
Dimensions and weight: 240(W) X 110 (H) X 150 (D) mm (Max), Approx. 3.5 kg

Need help?

Not sure exactly what you’re looking for or just want clarification? We’d be happy to chat with you and clear things up for you. Anytime!

Call anytime

+49 8131 998099

Email us


QC-Quality Control GmbH
Dieselstrasse 11
D-85757 Karlsfeld
Phone: +49 8131 998099
Fax: +49 8131 998101