Particle Sensor KS-41A

Ideal for Monitoring 0.15µm Particles in Photoresist, SOG, and Other Solutions


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Categories

Measuring Instruments > Particle Counting Systems > Liquid Particle Counter
Semiconductor > Particle Counter Semiconductor > Liquid Particle Counter Semiconductor

Description

Detects particles in photoresist down to 0.15µm size, at a flow rate of 10mL per minute
Four particle size ranges(4 channels, factory default setting)
≥0.15µm, ≥0.2µm, ≥0.3µm, ≥0.5µm
Integrated leak sensor with alarm output
User selectable channels within measurement range (using KE-40B1 function)

< Specification >

Optical system: Light-scattering method
Light source: Laser diode (wavelength 830 nm, rated output 200 mW)
Laser product class: Class1, IEC 60825-1
Materials of parts exposed to sample fluid: Synthetic quartz, PFA
Allowable sample fluid types: Fluids which do not corrode the fluid contact materials
Particle size range:
• 4 channels (factory default) ≥0.15µm, ≥0.2µm, ≥0.3µm, ≥0.5µm
• Userselectable channels 1 to 10 channels, setting made from Controller
Setting range (0.15µm to 0.5µm)
Counting efficiency: 50±10 %
Sample flow rate: 10mL/min
Maximum particle number concentration: 1 200 particles/ml
(at 5% coincidence loss for 0.15µm particles)
Power: DC12V (supplied from KE-40B1)
Dimensions and weight: 160 (H) × 300 (W) × 250 (D) mm (excluding protruding parts), Approx . 7.5 kg

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