Particle Sensor KS-41B

Ideal for Monitoring 0.1µm Particles in Photoresist, SOG, and Other Solutions


Image

Categories

Measuring Instruments > Particle Counting Systems > Liquid Particle Counter
Semiconductor > Particle Counter Semiconductor > Liquid Particle Counter Semiconductor

Description

For Photoresist, SOG, ARC, and other high noise materials
Minimum Detectable Particle Size – 0.1um
Sensor Flow Rate – 5 ml/min
Flow Cell Type – Synthetic Quartz
Counting Efficiency – 50 % ± 10 %
Wetted Parts – Synthetic quartz and PFA
Can be connected to the multiple monitoring system
Optimized RION noise reduction technology
Optional dynamic range upgrade (0.07-0.5um)
Industry Standard for ArF and Immersion resist, SOG/SOC, ARC, other polymeric materials
Note* – This unit can be installed in Batch or Inline Configuration

Need help?

Not sure exactly what you’re looking for or just want clarification? We’d be happy to chat with you and clear things up for you. Anytime!

Call anytime

+49 8131 998099

Email us

info@qc-quality-control.de

Address

QC-Quality Control GmbH
Dieselstrasse 11
D-85757 Karlsfeld
Phone: +49 8131 998099
Fax: +49 8131 998101
E-Mail: info@qc-quality-control.de
Contact