Particle Sensor KS-41B

Ideal for Monitoring 0.1µm Particles in Photoresist, SOG, and Other Solutions



Measuring Instruments > Particle Counting Systems > Liquid Particle Counter
Semiconductor > Particle Counter Semiconductor > Liquid Particle Counter Semiconductor


For Photoresist, SOG, ARC, and other high noise materials
Minimum Detectable Particle Size – 0.1um
Sensor Flow Rate – 5 ml/min
Flow Cell Type – Synthetic Quartz
Counting Efficiency – 50 % ± 10 %
Wetted Parts – Synthetic quartz and PFA
Can be connected to the multiple monitoring system
Optimized RION noise reduction technology
Optional dynamic range upgrade (0.07-0.5um)
Industry Standard for ArF and Immersion resist, SOG/SOC, ARC, other polymeric materials
Note* – This unit can be installed in Batch or Inline Configuration

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QC-Quality Control GmbH
Dieselstrasse 11
D-85757 Karlsfeld
Phone: +49 8131 998099
Fax: +49 8131 998101